Paper Title :Synthesis and Electrical Properties of (Ca0.8Sr0.2) ZrO3 Thin Films

Author :Cheng-Hsing Hsu, Po-Yu Chou, Ching-Fang Tseng

Article Citation :Cheng-Hsing Hsu ,Po-Yu Chou ,Ching-Fang Tseng , (2020 ) " Synthesis and Electrical Properties of (Ca0.8Sr0.2) ZrO3 Thin Films " , International Journal of Electrical, Electronics and Data Communication (IJEEDC) , pp. 25-28, Volume-8,Issue-5

Abstract : This paper describes physical and dielectric properties of (Ca0.8Sr0.2)ZrO3 on n-type Si substrate were fabricated by sol-gel method. Particular attention will be paid to the effects of preheating temperature and annealing temperature on the physical and dielectric properties. The (Ca0.8Sr0.2)ZrO3 films were characterized using X-ray diffraction (XRD) and scanning electron microscopy (SEM). The kinetic energies of the deposited atoms increased resulted in a microstructural improvement of the deposited (Ca0.8Sr0.2) ZrO3 thin films with increasing thermal treatments. Keywords - Sol-Gel Method, (Ca0.8Sr0.2) ZrO3 Thin Film, Electrical Properties, Microstructure

Type : Research paper

Published : Volume-8,Issue-5

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